# Ion Beam Source L125

> Original page (HTML): https://vaclab.ru/devices/ion_beam_sources/ion-source-ii-125
> Markdown version: https://vaclab.ru/devices/ion_beam_sources/ion-source-ii-125.md
> Manufacturer: LLC "Laboratory of Vacuum Technologies Plus" (LVT), vaclab.ru

Ion source with a 100x42x5 mm hollow rectangular beam and beam current up to 250 mA. Compact version for ion cleaning and assist deposition.

The principle of operation of the device is to ionize the atoms of the working gas in a direct current discharge in crossed magnetic and electric fields. A discharge is formed when the working gas and the supply voltage are supplied to the region bounded by the two magnetic poles of the cathode and the anode.

## Technical specifications

- Voltage, V: 500–5000
- Beam shape: Полый прямоугольный
- Beam width, mm: 42
- Beam thickness, mm: 5
- Ion energy, eV: 250–2500
- Maximal current, mA: 250
- Gas efficiency, mA/sccm: 9
- Maximal linear current density, mA/cm: 25
- Maximal beam angle, °: 2°
- Beam length, mm: 100
- Maximum permissible voltage, V: 5500
- Weight, kg: 5,1
- Working gases: любой, не вызывающий осаждения высокоомных слоёв на деталях устройства
- Coolant: дистиллированная вода, 20 % раствор этилового спирта в дистиллированной воде по ГОСТ 6709-72
- Minimum coolant consumption, l/min: 1
- Chamber working pressure range, Pa: 0,001–10