# Ion Beam Source D52

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> Markdown version: https://vaclab.ru/devices/ion_beam_sources/ion-source-ii-52.md
> Manufacturer: LLC "Laboratory of Vacuum Technologies Plus" (LVT), vaclab.ru

Gas-discharge ion source with a 24 mm tubular beam. Maximum beam current 120 mA with high current density in the treatment spot.

Gas-discharge ion sources for generating tubular beams. Principle of operation - anode layer ion beam source. High ion beam current is concentrated in a small area of a target which provides an efficient sputtering of any solid material.

## Technical specifications

- Voltage, V: 500–5000
- Beam shape: Полый цилиндрический
- Beam diameter, mm: 24
- Beam width, mm: 1
- Ion energy, eV: 250–2500
- Maximal current, mA: 120
- Gas efficiency, mA/sccm: 9
- Maximal beam angle, °: 2°
- Maximum permissible voltage, V: 5500
- Weight, kg: 0,5
- Working gases: любой, не вызывающий осаждения высокоомных слоёв на деталях устройства
- Coolant: дистиллированная вода, 20 % раствор этилового спирта в дистиллированной воде по ГОСТ 6709-72
- Minimum coolant consumption, l/min: 1
- Chamber working pressure range, Pa: 0,001–10