# Ion source L600

> Original page (HTML): https://vaclab.ru/devices/ion_beam_sources/ion-source-ii-600
> Markdown version: https://vaclab.ru/devices/ion_beam_sources/ion-source-ii-600.md
> Manufacturer: LLC "Laboratory of Vacuum Technologies Plus" (LVT), vaclab.ru

Ion source with a 574x42x5 mm hollow rectangular beam and beam current up to 1500 mA. Maximum working gas flow up to 5 l/h.

The device is designed to generate a linear flow of working gas ions with an energy of 300-2500 eV for a wide range of applications: ion cleaning, ion etching, ion polishing, ion modification, surface, assisting during spraying.

## Technical specifications

- Voltage, V: 500–5000
- Beam shape: Полый прямоугольный
- Beam width, mm: 42
- Beam thickness, mm: 5
- Ion energy, eV: 250–2500
- Maximal current, mA: 1500
- Gas efficiency, mA/sccm: 9
- Maximal linear current density, mA/cm: 25
- Maximal beam angle, °: 2°
- Beam length, mm: 574
- Maximum permissible voltage, V: 5500
- Weight, kg: 11
- Working gases: любой, не вызывающий осаждения высокоомных слоёв на деталях устройства
- Coolant: дистиллированная вода, 20 % раствор этилового спирта в дистиллированной воде по ГОСТ 6709-72
- Minimum coolant consumption, l/min: 1
- Chamber working pressure range, Pa: 0,001–10