# Magnetron 100K small

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Magnetron sputtering system (MSS) for round targets with a diameter of 80 and 100 mm, 3–5 mm thick.

Purpose: sputtering of conductive-material targets in vacuum. Max power 1000 W, operating voltage 300–800 V, operating pressure range 0.07–10 Pa.

Working gas: argon per GOST 10157-2016. Minimum coolant consumption at a working power of 1 kW is 1 l/min. Coolant (recommended): distilled water, 20% solution of ethyl alcohol in distilled water according to GOST 6709-72.

## Technical specifications

- Target diameter: 80; 100 mm
- Maximal target thickness: 3–5 mm
- Operating voltage, V: 300–800 V
- Maximal current, A: 8 A
- Maximum power, W: 1000 W
- Working gas: argon per GOST 10157-2016
- Minimum coolant consumption, l/min: 1 (at 1 kW)
- Operating pressure range, Pa: 0.07–10 Pa