# Linear Plasma generator RFPG-L400

> Original page (HTML): https://vaclab.ru/devices/plasma-generator-rpg-l400
> Markdown version: https://vaclab.ru/devices/plasma-generator-rpg-l400.md
> Manufacturer: LLC "Laboratory of Vacuum Technologies Plus" (LVT), vaclab.ru

A highly efficient plasma generator based on a high-frequency induction discharge.

The plasma generator is a universal technological device for a wide application of ion-plasma processing processes, meets all the requirements imposed in industrial production.

RFPG-L400 allows for high uniformity of processing when placing processed products on the drum.

The main element of the generator is an extended inductor through which an industrial frequency current (13.56 MHz) is passed.

The generators are made in an aluminum housing, equipped with a coaxial vacuum inlet.

The work surface is protected by a removable protective screen made of quartz glass, which makes it easy to clean it.

RFPG-L400 is an electrodeless generator of low-temperature high-density plasma designed for installation inside the technological volume of a vacuum chamber.

The device can be used for a wide range of technological processes:

- spraying of various materials in the plasma of inert or chemically active gases;
- ion and plasma chemical etching;
- evaporation, including with additional vapor ionization;
- plasma-stimulated deposition from the gas phase;
- ionic modification of the surface (oxidation, reduction, nitriding, carbidization, etc.);
- ionic cleaning and assisting.

The device is designed to create and maintain a gas-discharge low-temperature plasma in the working volumes of vacuum technological installations in a continuous mode.

## Technical specifications

- Dimensions *(Length x Width x Height),  mm, not more than: 520 х 92 х 49
- Maximum power, W: 2000
- Pressure range, Pa: 0,1..10
- Feedthrough diameter, mm: 60
- Weight, kg: 8,5