# Plasma source RFPG-250

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> Markdown version: https://vaclab.ru/devices/plasma_sources/plasma-generator-rpg-250.md
> Manufacturer: LLC "Laboratory of Vacuum Technologies Plus" (LVT), vaclab.ru

Plasma source for dense plasma generation.

Purpose: creation and continuous maintenance of high-density gas discharge plasma in working spaces of vacuum technological machines. RFPG-250 allows obtaining of ion flux with at least ±2% uniformity on a 200 mm diameter, ion flux density up to 25 mA/cm2)

Application: processes of ion and plasmachemical etching, depositing of thin film deposition, ion-plasma surface treatment: polishing, nitriding and carbonization. The devices work with any gases that do not cause depositing of low-resistance layers on the protective screen surface. Depositing rate: up to 40 µm/min, capacity: up to 20 kW.

Radio frequency plasma generator RFPG-250 – is an electrodless plasma source designed for low temperature, dense plasma generation in a relative large volume. It can be installed on or inside any vacuum chamber. The RFPG-250 can be used in a wide range of plasma technologies:

- Plasmachemical processes: RIE, PECVD
- Deposition of various materials in the any operation gases (noble or reactive).
- Ion and plasma etching.
- Evaporation, including evaporation with additional ionization of the evaporated material.
- Ion surface modification (oxidation, reduction, nitriding, carbonization ...).
- Ion cleaning and assisting
- Annealing

RFPG-250 is designed to be used in any type of vacuum machines. Its base element is a flat inductive coil, which is placed inside an aluminium case. All inner elements of the generator are tuned fine with a precision less than 0.1 mm. The case and sliding vacuum feedthrough provides an easy installation. The surface of the generator adjacent to plasma is protected by a quartz screen.

## Technical specifications

- Work zone diameter, mm: 200 mm
- Maximum power, W: 5000 W
- Pressure range, Pa: 0.1..10 Pa
- Case diameter, mm: 245 mm
- Feedthrough diameter, mm: 60 mm
- RF frequency, MHz: 13.56 MHz
- Minimum coolant consumption, l/min: 1.5