# Electron beam evaporation source EBE-280

> Original page (HTML): https://vaclab.ru/electron_beam_equipment/eli-280-electron-beam-evaporator
> Markdown version: https://vaclab.ru/electron_beam_equipment/eli-280-electron-beam-evaporator.md
> Manufacturer: LLC "Laboratory of Vacuum Technologies Plus" (LVT), vaclab.ru

Electron beam evaporation source intended for PVD of various materials in vacuum. Beam deflection angle is 225°, maximal power 6.0 kW.

The crucible can be rotated both continiously or step by step. It can be devided into up to four smaller evaporation zones.

## Technical specifications

- Maximal beam current: 0.6 A
- Anode voltage range: 5.0...10 kV
- Maximal beam deflection frequency: 50 Hz
- Cathode material: Tungsten
- Maximal power: 6 kW
- Crucible Size: D80x30 mm
- Beam deflection angle: 225°