# Vacuum technology and equipment for coating and etching of thin films

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> Manufacturer: LLC "Laboratory of Vacuum Technologies Plus" (LVT), vaclab.ru

The book summarizes the current state of one of the branches of the manufacturing of electronic equipment technology vacuum deposition and etching of thin films. The book contains a detailed description of magnetron sputtering systems, plasma chemical etching systems for thin film and the technological features of their use. It includes mathematical models, management methods and examples of reactive magnetron sputtering, the principles of construction and application of mid-range power supply for the reactive magnetron sputtering.