# Obtaining thin films by reactive magnetron sputtering

> Original page (HTML): https://vaclab.ru/media/books/book-reactive-sputtering-thin-films
> Markdown version: https://vaclab.ru/media/books/book-reactive-sputtering-thin-films.md
> Manufacturer: LLC "Laboratory of Vacuum Technologies Plus" (LVT), vaclab.ru

The book is a detailed reference guide to the basics of physical, technological features and practical application of reactive magnetron deposition of thin films of complex composition such as chemical compounds of metals or semiconductors with nitrogen, oxygen or carbon. It is a detailed description of the physical processes occurring during reactive magnetron sputtering and its technological features. Particular attention is paid to methods of process control reactive magnetron deposition of thin films which provide the stability and reproducibility of both the coating process and the properties of the resulting films.