# Ionic etching

> Original page (HTML): https://vaclab.ru/pvd_systems/ionic-etching
> Markdown version: https://vaclab.ru/pvd_systems/ionic-etching.md
> Manufacturer: LLC "Laboratory of Vacuum Technologies Plus" (LVT), vaclab.ru

Ion etching systems built on LVT ion beam sources: substrate cleaning before deposition, surface structuring, ion polishing and deposition assist. The principles of the ion sources and the choice of working gases are described in [Ion beam sources](/ion_beam_sources).