# NIKA-151-MFP Complex of vacuum processing

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> Manufacturer: LLC "Laboratory of Vacuum Technologies Plus" (LVT), vaclab.ru

Components of the NIKA-151 complex:

- a cooled vacuum chamber with 2 doors;

- A powerful system for quick pumping: cryopump, Roots vacuum pump, foreline pump;

- built-in water cooling system;

- quadrupole spraying system;

- ion cleaning system;

- plasma processing system.

Technological devices:

- heaters - 4 pcs .;

- RPG-250 plasma generator - 1 pc.;

- source of ions II-700 - 1 pc.;

- 2 sets of interchangeable magnetrons:

No. 1 - magnetrons-787- 4 pcs.;

No. 2 - magnetrons-479 - 4 pcs.;

- planetary carousel;

- temperature sensors;

- bias potential feed system;

- infrared pyrometer.

The kit allows you to process parts in size:

- length not more than 600 mm;

- width (diameter) not more than 65 mm;

- weight not more than 3 kg.

The pressure in the chamber 30 minutes after the start of pumping is no more than 5 ? 10-3 Pa. The maximum working temperature for heating the workpieces is 600 ° C.

Functional coatings: Ag, Au, Ni, etc .;

Reinforcing coatings: AlTiN, AlCrN, AlSiTiN, AlSiCrN;

Multiphase coatings nc-TiN / nc-AlN, nc-TiAlN / a-Si3N4, nc-CrAlN / a-Si3N4, nc-TiN / a-CrB2, nc-Cr2O3 / ns-Al2O3, ns-TiO2 / nc-Al2O3;

Heat-resistant and heat-resistant coatings.

Ion-plasma low-temperature nitriding of surfaces - surface hardness according to AISI 316 L - not less than 1200 Hv

Billets - shovels, trunnions, worm cutters, casting molds.

## Technical specifications

- Voltage, V: 380 V
- Power connection type: TN-S
- Dimensions *(Length x Width x Height),  mm, not more than: Overall dimensions of the unit on a transport base, no more
(2800x1230x2260) mm (length x width x height).
- Power consumption, not more, W: 120 kW
- Ultimate vacuum, Pa: max 6·10-4 Pa
- Weight, kg: no more than 2300 кг
- Working gases: argon, nitrogen, hydrogen, air
- Number of gas injection channels, pcs.: 5
- Coolant: distilled water
- Объем охлаждающей жидкости,  l.: no more than 15 l