# Nika-2012

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> Markdown version: https://vaclab.ru/pvf_machines/nika-2012.md
> Manufacturer: LLC "Laboratory of Vacuum Technologies Plus" (LVT), vaclab.ru

Nika-2012 series: a modern analogue of the bell-type machines of the UVN-71 series. A stainless steel chamber ?400?350 or ?500?400 mm with a cooling jacket. Integral columnless design. Oil-free pumping (turbomolecular or cryogenic pump). Floor area with the service zone is 3 m?, footprint 2 m?.

The movable bottom flange carries 4 ISO63 positions for devices of your choice: magnetrons, an ion source, a plasma generator, thermal evaporators. A flat carousel for one-side treatment (6 round ?100 mm substrates, or 12 rectangular 60?48 mm), or a flip system for two-sided treatment. Quick carousel changeover for different substrates. Automatic shutter drive.

The top flange has provisions for a heater and a quartz film thickness monitor. 5 ISO63.3 view ports with shutters; any port can be replaced with an ISO160 flange for additional equipment.

Power supply: 380 V, 50 Hz, 8–15 kW. Dimensions: 850–1415 ? 900–1100 ? 1750–1900 mm. Weight: 300–600 kg.

The series includes basic configurations for typical tasks: IN (ion deposition), RS (resistive layer sputtering), PS (conductive layer sputtering), TN (thermal deposition), and the plasma-chemical MO/MT (magnetron deposition/etching). All machines are fully automated under computer control, which handles the vacuum system and the process. A manual mode is provided for technology debugging and system diagnostics, and processes run automatically by recipes.