# Nika-2014 PE

> Original page (HTML): https://vaclab.ru/pvf_machines/nika-2014-pht
> Markdown version: https://vaclab.ru/pvf_machines/nika-2014-pht.md
> Manufacturer: LLC "Laboratory of Vacuum Technologies Plus" (LVT), vaclab.ru

Nika-2014 - a series of compact vacuum systems for etching of semiconductors and dielectrics in a high-density plasma.

The Nika-2014 includes:

- oil-free pumping
- the working chamber of the installation with a radius of Z50x300 mm.
- set of technological devices of the installation;
- RF plasma generator RPG-250;
- water-cooled/heated.

Loading table;

- matching devices SURA (2) and RF generator (2).
- optical system for monitoring the speed and depth of etching.

- Technological devices are located on the upper flange of the chamber.

- Camera with vertical lift, closed with a casing

- Control and monitoring of installation systems with a touch monitor

Control cabinet

In the cabinet / rack are placed:

- power supply and control
- units vacuum system,
- TMN
- vacuum monitoring devices
- PC, keyboard

In the section there are:

- air preparation
- system automation elements
- elevator drive chambers
- pumping and preparation system

## Technical specifications

- Dimensions *(Length x Width x Height),  mm, not more than: 1200 х 850 х 1500
- Weight, kg: 300 kg/300 кг