# NIKA-2013

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> Manufacturer: LLC "Laboratory of Vacuum Technologies Plus" (LVT), vaclab.ru

Nika-2013 Series: high-efficient machines for a wide range of industrial applications.

A cylindrical stainless steel chamber with a cooling jacket. Sizes ?700х500 mm, axis position is horizontal. Cryogenic or turbomolecular pump, with a scroll pump for rough pumping. Horizontal flange movement system for easy reloading and maintenance. Replaceable set of substrate holders for reloading time reduction.

**Rear flange:** seven ISO63 mounting positions for technological devices: up to four magnetrons, heater, and ion source.

**Front flange:** 600 mm horizontal drum, automatic shutter control. Deposition uniformity at least ±2%, 128 60x48 substrates, 48 substrates ?100. Up to four windows equipped with shutters. Each window can be replaced with an ISO100 mounting flange for auxiliary equipment. Loading: 128 rectangular substrates 60x48 mm or 48 round substrates, ?100 mm.

**Power supply: **380 V, 50 Hz, 20 – 25 kW.

**Dimensions:** 1600x1600x1900.

**Weight:** 800 kg.

Nika-2013 series includes several major modifications: for conductive and resistive layers deposition, PECVD and plasma etching machine.