# Machine tor thermal spraying with dosed feed NIKA-138-01 

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> Manufacturer: LLC "Laboratory of Vacuum Technologies Plus" (LVT), vaclab.ru

Small-sized machine based on a vacuum post NIKA-12-500, in a chamber with 3 viewing Windows. Dry oil-free pumping ( NVK and NVSP).

The unit is designed for applying thin layers of metals with a thickness of up to 3 microns by resistive evaporation.one of the evaporators has the function of metered material supply - a vibrobunker of the original design is installed. 

By installing the magnetron, the sublayer application function is implemented. with thickness control at the time of application of layers,

Technological devices are located on the lower (working) flange:

- two thermal vaporizers;

- source of IBS-145 ions for cleaning the surface of substrates;

- magnetron type "D100" (in a special version);

- heater;

- hopper with controlled feed of the powder sprayed material;

- positioned flap;

- carousel ( 8 sector carriers for 60 x 48 mm substrates);

- a witness of resistance and a temperature sensor.

The total load is 15 plates (60 x 48 mm).

Included in delivery:

- set of protective screens

- set of media

- automatic recycling water supply system (SOVA)

All processes are automated, control and monitoring of processes from the touch panel of the computer, remote access is provided.

## Technical specifications

- Voltage, V: 380В +10-15 %
- Power, kW: 22 kVt
- Maximum current consumption per phase, A: 32 A
- Ultimate vacuum, Pa: no more than 3·10-4 Pa
- Weight, kg: 800 kg (+ 100 kg compressor unit, + 24 kg. Foreline pump)
- Time to reach working vacuum, min.: no more than 10 min
- Working gases: argon
- Number of gas injection channels, pcs.: 3
- Coolant: distilled water,
20% ethyl alcohol solution in distilled water
- Time to reach ultimate vacuum, min.: no more than 2 hours
- Working vacuum , Pa: 5·10-3 Pa