# NIKA-2013 VS Vacuum system

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> Markdown version: https://vaclab.ru/pvf_machines/vacuum_systems/nika-2013-vp-vacuum-post.md
> Manufacturer: LLC "Laboratory of Vacuum Technologies Plus" (LVT), vaclab.ru

A compact vacuum system based on a cylindrical stainless steel chamber ?700 х 550 mm with a cooling jacket. Integrated rack-free version. Oil-free pumping (turbomolecular or cryogenic pump). Area, including service zone – 3 m2, plan view area– 2 m2.

Side flanges ?700 mm are hanged on independent hangers which makes possible horizontal movement. Each flange has an ISO500 hole for a smaller flange with holes for placement of technological devices, rotation feedthrough, viewports, etc. A base configuration provides placement of technological devices on the back flange and rotation feedthrough and viewports on the frontal one. Chamber's sizes allow to place up to seven technological devices and a planetary rotation mechanism for two-sided treatment of substrates.

Rack mount provides up to 24U of space for power units and another equipment. Forepump and cryopump's compressor are also placed inside of the rack thus significantly lowering noise level and facilitating maintenance.

## Technical specifications

- Power connection type: 3p 380V (3P+N+PE)
- Booster pump: Optional
- Dimensions *(Length x Width x Height),  mm, not more than: 1620/3150 mm х 1420/2400 mm х 2100 mm
- Orientation: Horizontal
- Material: AISI316
- Windows: 4 x ISO80 (с заслонкой)
- Diameter: 700 mm
- Length: 550 mm
- Standard set: >>>
- Assembly: >>>
- Devices flange: >>>
- Load flange: >>>
- Pumping: тхт