# Vacuum chambers

> Original page (HTML): https://vaclab.ru/vacuum-chambers
> Markdown version: https://vaclab.ru/vacuum-chambers.md
> Manufacturer: LLC "Laboratory of Vacuum Technologies Plus" (LVT), vaclab.ru

**High-Vacuum Chambers**

We manufacture high-vacuum chambers for scientific, technological, and industrial applications. The designs are developed with strict requirements for leak tightness, precision, thermal resistance, and achievable vacuum level.

**High-Vacuum Stainless Steel Chambers**

The chambers are manufactured from stainless steel (AISI 304L equivalent) using internal argon arc welding and mechanical polishing of the internal surfaces up to Ra 0.8.

Available size options:

• ? 250–500 mm, height up to 500 mm

• ? 500–700 mm, height up to 700 mm

• ? 700–1000 mm, height up to 1000 mm

Technical specifications:

• Flange standards: CONFLAT (copper seal), ISO KF (elastomer seal)

• Angular alignment accuracy of welded ports:

• Ultimate achievable pressure inside the chamber:

• Maximum mechanical polishing level of internal surfaces: Ra 0.8

**High-Vacuum Chambers by Volume**

Chambers with volume up to 100 L

• Material: stainless steel / aluminum alloy

• Ultimate residual pressure range: from 1 Pa to 1?10?? Pa

• Leak rate: not more than 1.0?10??? m?·Pa/s

• Allowable pressure differential between internal and external surfaces: at least 1.2?10? Pa

• Internal surface roughness: not more than Ra 1.6

• Sealing surface roughness: not more than Ra 0.8

**Chambers with volume from 100 to 500 L**

Technical parameters are identical to those of chambers up to 100 L, with increased overall dimensions.

**Welded Chamber for Coating Systems (240 L)**

• Material: stainless steel 12Kh18N10T or AISI 304 equivalent (non-magnetic)

• Ultimate residual pressure: 1?10?? Pa

• Type (if applicable): with externally welded cooling channels

• Thermal resistance: up to 500°C

• Design includes dovetail grooves for sealing elements

**Stainless Steel Chamber for Electron-Beam Lithography Load-Lock Systems**

• Total volume: approximately 53,000 cm?

• Material: stainless steel 12Kh18N10T (GOST 5632-2014)

• Ultimate residual pressure: approximately 10?? Pa

• Thermal resistance: corresponding to the material properties

• Assembly units are welded from individual components